MPaCT Lab semiconductor research facility at Northern Arizona University
NAU Nano | Flagstaff, Arizona

MPaCT
Lab at NAU

The Microelectronics Processing and Characterization Testing Lab is a $13 million premier research facility housing 35+ advanced instruments, a Yellow Light Room, and expert staff open to universities, companies, and government agencies nationwide.

Lab at a Glance
$13M
Facility Investment
35+
Advanced Instruments
Yellow Light Room
3K+ sq ft
Research Facility
Open-Access Lithography Thin Films Characterization Metrology

One facility. 35+ instruments. Open to every researcher who walks through the door.

The MPaCT Lab is Northern Arizona University's collaborative research facility for semiconductor processing, materials characterization, and device testing. It serves NAU students, faculty from any department, visiting researchers, and industry engineers, all under the same roof, using the same tools.

Full-time staff manage every instrument, run training sessions, and support projects from undergraduate coursework to federally funded research and industry contract work. You bring the science, and we handle the rest.

Collaborative Hub

Open Access. World-Class Tools.

The Microelectronics Processing and Characterization Testing Lab (MPaCT) is Northern Arizona University's centralized, multi-user research facility for microelectronics, advanced materials, device fabrication, and technical characterization. Funded through a combination of state appropriations, federal grants, and industry partnerships, the lab houses over 35 instruments across a 3,000+ sq ft research facility featuring a Yellow Light Room and adjacent characterization suites.

Designed to foster cross-disciplinary innovation, the MPaCT Lab is not restricted to any single department or college. NAU students, faculty from any discipline, visiting researchers, and private-sector engineers all use the same equipment under the same roof. Staff handle instrument maintenance, calibration, and user training so researchers can focus on their work.

Open to All Researchers

No departmental restrictions. NAU affiliates and external users gain access after completing safety orientation.

Staff-Supported Operations

Full-time technicians provide training, run samples on request, and assist with data collection and interpretation.

Maintained & Calibrated

All instruments are on active service contracts. Calibration records and consumables are managed by lab staff.

Students working in the MPaCT Lab
Equipment training session
Nano-Device Fabrication
Advanced Capabilities

What the Lab Does

The MPaCT Lab supports research and instruction across electrical engineering, mechanical engineering, computer engineering, physics, and materials science. The facility handles everything from undergraduate coursework to federally funded research programs.

Researchers use the lab to deposit and pattern thin films, characterize material properties at the nanoscale, fabricate prototype devices, and perform failure analysis. The lab also serves as the training ground for NAU's semiconductor workforce programs.

Core Capabilities

Metrology

AFM, SEM, Optical Profiling

Lithography

Mask Aligner, Spin Coating

Deposition

Sputtering, Evaporation, ALD

Characterization

Electrical, Thermal, Optical

Facility Buildout

Building the Future

From blueprint to breakthrough: how the MPaCT Lab came to life.

MPaCT Lab first floor life safety plan: facility layout and room designations
3,000+ sq ft
35+ Instruments

A Research Milestone Built with Purpose

The MPaCT Lab represents NAU's commitment to next-generation materials and device research. Over four phases, we transformed a vision into a fully operational research facility, attracting partners including TSMC and Intel.

Facility Environment ISO 6 • Controlled Environment
Primary Users 5+ NAU Departments
Industry Partners TSMC • Intel
Getting Started

How to Access the Lab

Four clear steps to begin your research at the MPaCT facility.

1
Submit a Request

Fill out our equipment or facility access form. Describe your project scope and the instruments you need.

2
Lab Review

Our staff reviews your request, confirms availability, and follows up with access options and rate estimates.

3
Safety Orientation

Complete required general safety training and instrument-specific certification before your first session.

4
Begin Research

Schedule and run sessions with staff support available throughout. Track time and generate data reports.

Active Research

Areas of Scientific Focus

MPaCT enables research across a broad spectrum of materials science and semiconductor engineering domains.

01
Thin Film Deposition & Analysis

Investigation of PVD/CVD thin film properties (composition, thickness uniformity, crystal orientation, and stress) foundational for semiconductor and photovoltaic device engineering.

XRD Ellipsometry Sputtering
02
Micro & Nanofabrication

Photolithography, nanoimprint lithography, and laser ablation for creating device patterns at micron and sub-micron scale, ranging from academic prototypes to near-industrial specifications.

Lithography NIL Laser Ablation
03
Materials Characterization

Structural and chemical analysis of materials from bulk crystals to nanoparticles. This integrates SEM, TEM, XRD, SIMS, and surface profiling into comprehensive data packages.

SEM / TEM SIMS AFM
04
Semiconductor Device Testing

Wafer-level and die-level electrical characterization of semiconductor devices to support transistor physics research, process development, and performance benchmarking.

Probe Station I-V / C-V RF Testing
Open-Access Research Facility

Ready to Do Something Extraordinary?

The MPaCT Lab is open to NAU students, faculty, external researchers, and industry engineers. Reach out to discuss access, training requirements, and collaboration opportunities.