The MPaCT Lab at
Northern Arizona University
A $13 million shared-use research facility dedicated to microelectronics processing, semiconductor metrology, and hands-on workforce training — open to NAU, external researchers, and industry partners nationwide.
Open Access. World-Class Tools.
The Microelectronics Processing and Characterization Testing Lab (MPaCT) is Northern Arizona University's centralized research facility for semiconductor and materials science work. Funded through a combination of state appropriations, federal grants, and industry partnerships, the lab houses over 25 instruments across a 1,500 sq ft Class 1000 cleanroom and adjacent characterization suites.
As a shared-use facility, the MPaCT Lab is not restricted to any single department or college. NAU students, faculty from any discipline, visiting researchers, and private-sector engineers all use the same equipment under the same roof. Staff handle instrument maintenance, calibration, and user training so researchers can focus on their work.
Building Arizona's Innovation Infrastructure
Arizona has attracted over $100 billion in semiconductor capital investment in recent years. NAU is building the research and training infrastructure that Northern Arizona needs to participate in that growth.
Research Infrastructure
The lab provides metrology, deposition, and characterization capabilities that previously required sending samples out of state. Faculty and graduate students now conduct thin film, nanomaterial, and device research on campus.
Workforce Development
In direct partnership with TSMC, Intel, and Microchip Technology, NAU has developed hands-on training programs that produce process technicians and engineers ready for the fab floor from day one.
Industry Services
Companies use the lab for contract metrology, failure analysis, and R&D prototyping on a fee-for-service basis. We also develop custom training programs for corporate partners across the semiconductor supply chain.
What the Lab Does
The MPaCT Lab supports research and instruction across electrical engineering, mechanical engineering, computer engineering, physics, and materials science. The facility handles everything from undergraduate coursework to federally funded research programs.
Researchers use the lab to deposit and pattern thin films, characterize material properties at the nanoscale, fabricate prototype devices, and perform failure analysis. The lab also serves as the training ground for NAU's semiconductor workforce programs.
Core Capabilities
Metrology
AFM, SEM, Optical Profiling
Lithography
Mask Aligner, Spin Coating
Deposition
Sputtering, Evaporation, ALD
Characterization
Electrical, Thermal, Optical
Who Can Use the Lab?
The MPaCT Lab serves researchers and engineers at every level. Access is available through the pathways below.
NAU Students & Faculty
All NAU-affiliated researchers gain access after completing the required safety orientation. The lab supports coursework, thesis projects, and funded research.
- Safety training provided
- Course & thesis integration
- Graduate research support
- Capstone project access
External Researchers
Faculty and researchers from other institutions can use the lab through collaborative agreements or fee-for-service arrangements.
- Visiting researcher status
- Collaborative agreements
- Mail-in sample analysis
- Data sharing protocols
Industry & Government
Private companies and government agencies use the lab for contract testing, R&D prototyping, and customized workforce training programs.
- Fee-for-service testing
- NDA & IP protections
- Custom R&D projects
- Corporate training
Publication Acknowledgement
Research conducted using MPaCT Lab equipment or staff assistance should include the following acknowledgement in any resulting publications, presentations, or reports:
"This work was performed in part at the Microelectronics Processing and Characterization Testing Lab (MPaCT) at Northern Arizona University, Flagstaff, AZ."
Consistent acknowledgement across publications helps the university track facility usage and justify continued investment in shared research infrastructure.