Keyence VK-X3000 3D Surface Profiler
A 3D laser scanning confocal microscope for non-contact surface profilometry. The VK-X3000 combines laser confocal, focus variation, and interferometry methods for accurate 3D measurements across diverse materials.
System Capabilities
The VK-X3000 delivers high-resolution 3D surface measurements using multiple optical principles in a single system. It supports roughness, step height, and surface topography characterization with non-contact operation.
Multi-mode measurement expands the range of measurable surfaces while preserving accuracy across reflective, textured, and mixed materials.
Operating Modes
Laser Confocal
High-resolution surface profiling using laser confocal scanning.
Focus Variation
Captures rough or steep surfaces by stacking focus information.
White Light Interferometry
Precise height measurements with interferometric sensitivity.
Spectral Interference
High-precision profiling for thin films and smooth surfaces.
Technical Specifications
| Measurement Principles | Laser confocal, focus variation, white light interferometry, spectral interference |
|---|---|
| Magnification Range | 42x to 28800x (total) |
| Field of View | 11 um to 7398 um |
| Laser Wavelengths | 404 nm (VK-X3100) or 661 nm (VK-X3050) |
| Max Measurement Speed | Surface 125 Hz, line 7900 Hz |
| Height Resolution | 0.01 nm |
Comparison: This System vs Conventional Alternative
A high-level comparison to highlight performance and workflow advantages.
| Feature | This System | Conventional Method |
|---|---|---|
| Precision | Higher accuracy and repeatability | Standard tolerance |
| Workflow | Streamlined and automated | Manual or multi-step |
| Throughput | Faster turnaround | Slower cycle time |