Metrology 3D Surface Profiling

Keyence VK-X3000 3D Surface Profiler

A 3D laser scanning confocal microscope for non-contact surface profilometry. The VK-X3000 combines laser confocal, focus variation, and interferometry methods for accurate 3D measurements across diverse materials.

Keyence VK-X3000
Height Resolution 0.01 nm
Scan Area Up to 50 x 50 mm
Max Line Speed Up to 7900 Hz
Magnification 42x to 28800x

System Capabilities

The VK-X3000 delivers high-resolution 3D surface measurements using multiple optical principles in a single system. It supports roughness, step height, and surface topography characterization with non-contact operation.

Multi-mode measurement expands the range of measurable surfaces while preserving accuracy across reflective, textured, and mixed materials.

Operating Modes

Laser Confocal

High-resolution surface profiling using laser confocal scanning.

Focus Variation

Captures rough or steep surfaces by stacking focus information.

White Light Interferometry

Precise height measurements with interferometric sensitivity.

Spectral Interference

High-precision profiling for thin films and smooth surfaces.

Technical Specifications

Measurement Principles Laser confocal, focus variation, white light interferometry, spectral interference
Magnification Range 42x to 28800x (total)
Field of View 11 um to 7398 um
Laser Wavelengths 404 nm (VK-X3100) or 661 nm (VK-X3050)
Max Measurement Speed Surface 125 Hz, line 7900 Hz
Height Resolution 0.01 nm

Comparison: This System vs Conventional Alternative

A high-level comparison to highlight performance and workflow advantages.

Feature This System Conventional Method
Precision Higher accuracy and repeatability Standard tolerance
Workflow Streamlined and automated Manual or multi-step
Throughput Faster turnaround Slower cycle time

Common Applications

Surface Roughness Quantify Ra, Rq, and other roughness parameters.
Step Height Measure steps, trenches, and microstructures.
Thin Films Evaluate film thickness and surface uniformity.
Micro-Mechanical Parts Inspect features on MEMS and precision components.