Metrology Field Emission SEM

JEOL JSM-IT710HR Field Emission SEM

A Schottky field emission scanning electron microscope for high-resolution imaging and microanalysis. It supports high- and low-vacuum operation with integrated EDS for live spectra and X-ray mapping.

JEOL JSM-IT710HR SEM
Electron Source Schottky FEG
Max Probe Current >= 300 nA
Vacuum Modes High / Low
Analytics Integrated EDS

System Capabilities

The JEOL JSM-IT710HR is a compact, multipurpose field emission SEM designed for high-resolution imaging and microanalysis. It delivers high probe current with a small probe size for detailed surface morphology and compositional contrast.

High- and low-vacuum modes accommodate conductive and non-conductive samples, with secondary electron and quadrant backscatter detectors plus live 3D surface reconstruction. Integrated JEOL EDS enables live spectra and X-ray mapping.

Operating Modes

High-Vacuum Imaging

High-resolution SE and BSE imaging for conductive or coated samples.

Low-Vacuum Imaging

Controlled pressure imaging for poorly conducting or outgassing samples.

Live EDS Analysis

Real-time spectra and X-ray maps during imaging.

3D Surface Reconstruction

Live 3D topography using the quadrant BSE detector.

Technical Specifications

Electron Source In-lens Schottky field emission gun
Maximum Probe Current >= 300 nA delivered to specimen
Vacuum Modes High vacuum and low vacuum with one-click switching
Detectors SE and quadrant BSE with live 3D function
Integrated Analytics JEOL EDS for live spectra and X-ray maps
Automation Montage, scripting, remote control, and data management

Comparison: This System vs Conventional Alternative

A high-level comparison to highlight performance and workflow advantages.

Feature This System Conventional Method
Precision Higher accuracy and repeatability Standard tolerance
Workflow Streamlined and automated Manual or multi-step
Throughput Faster turnaround Slower cycle time

Common Applications

High-Resolution Imaging Surface morphology and microstructure of metals, semiconductors, polymers, and ceramics.
Elemental Analysis Qualitative and semi-quantitative EDS point analysis and mapping.
3D Surface Visualization Topographic reconstruction of rough or complex surfaces.
Automated Imaging Large-area montages and repeatable imaging workflows for QA and R&D.