Metrology 3D Optical Profiling

Lyncee Tec DHM-R2100 Optical Holographic Profiler

A reflection-mode digital holographic microscope for non-contact 3D surface profilometry. It provides interferometric vertical resolution for real-time topography on reflective and partially reflective samples.

DHM-R2100 Optical Holographic Profiler
Vertical Resolution ~0.3 nm
Live Range ~200 um
Max Step Height ~2.1 to 3 um
Frame Rate Up to 190 fps

System Capabilities

The DHM-R2100 is a dual-wavelength reflection DHM designed for quantitative 3D surface measurements. It captures full-field holograms to reconstruct height maps without mechanical scanning.

The system supports real-time measurement of static and dynamic surface features and can resolve sharp steps and complex topography with nanometer-scale vertical precision.

Operating Modes

Single-Wavelength DHM

High-precision profiling for smooth surfaces and small steps.

Dual-Wavelength Mode

Extended step-height capability using synthetic wavelength processing.

Real-Time 3D Profilometry

Full-field 3D maps from a single hologram frame.

Numerical Refocusing

Digital refocus after capture to inspect different depths.

Technical Specifications

Configuration Reflection DHM, dual-wavelength
Typical Wavelengths ~666 to 675 nm and ~794 nm
Vertical Accuracy ~0.15 nm (single-wavelength mode)
Lateral Resolution Objective-dependent, down to ~300 nm
Acquisition Rate Up to ~190 fps at 1024 x 1024
Minimum Reflectivity Below 1 percent in reflection mode

Comparison: This System vs Conventional Alternative

A high-level comparison to highlight performance and workflow advantages.

Feature This System Conventional Method
Precision Higher accuracy and repeatability Standard tolerance
Workflow Streamlined and automated Manual or multi-step
Throughput Faster turnaround Slower cycle time

Common Applications

Surface Topography 3D mapping of micro and nano-scale topography.
MEMS Dynamics Out-of-plane displacement and vibration analysis.
Defect Inspection Inspection of patterned or etched features and steps.
Through-Window Metrology Topography measurement through transparent windows or covers.